Hitachi High-Tech Launches High-Throughput and High-Sensitivity Wafer Surface Inspection System LS9600
TOKYO, Dec 13, 2022 – (JCN Newswire via SEAPRWire.com) – Hitachi High-Tech Corporation announced today the launch of the LS9600, a new system for detecting particles and defects on non-patterned wafer surfaces. It features a new high-output, short-wavelength laser that improves throughput at the sensitivity levels required for the mass production of cutting-edge semiconductor devices […]